An investigation on the construction of microchannels in bulk glass using a femtosecond laser was conducted to determine the favorable parameters of the laser for the process. After laser writing, the channels were cleaned in water under the action of ultrasound, which helped not to change the geometry of the channel and make the cleaning process non-toxic. The fabrication of microchannels in two-phase glass is also considered. The stage of ultrashort laser writing is followed by the stage of etching in potassium hydroxyl (KOH) to finalize the process and observe the effect of the etchant on the shape of the channels, while giving the glass porous properties.
Бархум Х., Шишкина А.С. (науч. рук. Заколдаев Р.А.) LASER-INDUCED GLASS STRUCTURING FOR MICROFLUIDICS // Сборник тезисов докладов конгресса молодых ученых. Электронное издание. – СПб: Университет ИТМО, [2022]. URL: https://kmu.itmo.ru/digests/article/9621