New method for microchannel fabrication in bulk glass using a femtosecond laser was demonstrated. A substrate of two-phase glass was used to obtain microstructures in nanoporous silicate matrix using hydrochloric acid for the chemical etching step. Two types of structures were obtained, depending on the used laser power, distinguished with an outer layer of compressed material with increased refractive index. The method we report offers new possibilities for optofluidic devices fabrication using the outer shell as waveguide medium.
Бархум Х., Андреева О.В., Шишкина Е.В. (науч. рук. Заколдаев Р.А.) Microchannel fabrication in porous glass using femtosecond laser direct writing with subsequent chemical etching // Сборник тезисов докладов конгресса молодых ученых. Электронное издание. – СПб: Университет ИТМО, [2023]. URL: https://kmu.itmo.ru/digests/article/11280